Directory Record for:
Stephen J. Fonash
Title(s):
Kunkle Chair, Professor of Engineering Sciences
Director, Center for Nanotechnology Education and Utilization
Department:
Engineering Science and Mechanics
College/Admin. Unit:
College of Engineering
Office Address:
114 Lubert Building
University Park, PA 16802
Office Phone:
(814) 865-4931
Office Fax:
(814) 865-3018
E-Mail Address:
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Web Page(s):
Research Synopsis:
My research focuses of nanofabrication processing of electronic devices and materials. Specific interests are in nanobiotechnology, nanostructured silicon and chemical nanofabrication.
Technologies Impacted by Research:
Semiconductor, electro-optics, biomedical
Selected Publications:
- Nam WJ, Bae S, Kalkan AK, et al., "Nano- and microchannel fabrication using column/void network deposited silicon", J Vac Sci Technol A 19 (4): 1229-1233 (2001).
- Cuiffi JD, Hayes DJ, Fonash SJ, et al. "Desorption-ionization mass spectrometry using deposited nanostructured silicon films" ANAL CHEM 73 (6): 1292-1295 MAR 15 2001
- Kalkan AK, Bae SH, Li HD, et al., "Nanocrystalline Si thin films with arrayed void-column network deposited by high density plasma" J APPL PHYS 88 (1): 555-561 JUL 1 2000

