Directory Record for:

Stephen J. Fonash

Title(s):

Kunkle Chair, Professor of Engineering Sciences

Director, Center for Nanotechnology Education and Utilization

Department:

Engineering Science and Mechanics

College/Admin. Unit:

College of Engineering

Office Address:

114 Lubert Building

University Park, PA 16802

Office Phone:

(814) 865-4931

Office Fax:

(814) 865-3018

E-Mail Address:

Validate to view address - Send Email via form

http://www.cneu.psu.edu

Research Synopsis:

My research focuses of nanofabrication processing of electronic devices and materials. Specific interests are in nanobiotechnology, nanostructured silicon and chemical nanofabrication.

Technologies Impacted by Research:

Semiconductor, electro-optics, biomedical

Selected Publications:

Nam WJ, Bae S, Kalkan AK, et al., "Nano- and microchannel fabrication using column/void network deposited silicon", J Vac Sci Technol A 19 (4): 1229-1233 (2001).
Cuiffi JD, Hayes DJ, Fonash SJ, et al. "Desorption-ionization mass spectrometry using deposited nanostructured silicon films" ANAL CHEM 73 (6): 1292-1295 MAR 15 2001
Kalkan AK, Bae SH, Li HD, et al., "Nanocrystalline Si thin films with arrayed void-column network deposited by high density plasma" J APPL PHYS 88 (1): 555-561 JUL 1 2000