ICAT Research Activities
Piexoelectric Thin Films
Thin film piezoelectrics are an attractive means of actuation for miniature components. We are fabricating the [100] oriented rhombohedral PZT films, which are expected to generate piezoelectric constants 4-5 times larger than the conventional PZT film devices. We demonstrated a blood tester MEMS device in collaboration with OMRON Corporation, Japan (Photo 6).
Photo 6: PZT film micropump for blood test.